Deep Reaction Ion Etcher (DRIE)
- Buyer
- Uppsala universitet, Uppsala
- Country
- Sweden
- Estimated value
- —
- Deadline
- 10 Nov 2026, 00:00 CET
- Published
- 12 Oct 2026
- Procedure
- Open procedure
- Contract type
- Supplies
Categories
- 42000000 Industrial machinery
From the original notice
Myfab Uppsala aims at purchasing a Deep Reaction Ion Etcher (DRIE). The purpose of the tool is to transfer patterns defined by e.g., photo- and electron beam lithography covering the pattens size range from all substrate range down to a few nanometres. The system will be used by many operators in a university laboratory environment. It must be easy to use and be insensitive to frequent change of process between batches. The processes include broad range of etching capability: low to high etch rate, wafer dicing, high uniformity, high open area, high aspect ratio, and nanometre scale. The…
Past winners
| Winner | Date | Value | Category | View on TED |
|---|---|---|---|---|
| Agilent Technologies Sweden AB | 4 Sept 2026 | €232.2K | Mass spectrometer | |
| Agilent Technologies Sweden AB | 17 Jul 2026 | €232.2K | Mass spectrometer | |
| Handjord av Kullsand AB | 11 Jun 2026 | €1.4M | Restaurant and food-serving services | |
| Crisp Film AB | 27 May 2026 | — | Motion picture and video services | |
| Micromedic AB | 4 May 2026 | €399.9K | Microscopes | |
| Kloe | 4 May 2026 | €263.3K | Industrial machinery | |
| AMAZEMET Sp. z o.o. | 4 May 2026 | €599.5K | Laboratory, optical and precision equipments (excl. glasses) | |
| Thermo Electron Sweden AB | 4 May 2026 | €422.1K | Mass spectrometer | |
| Varbi AB | 23 Feb 2026 | €479.1K | System and support services | |
| AgriClima Consulting AB | 21 Jan 2026 | — | Research and development consultancy services |
25 awards in 12 months · 24 different winners
Based on contract award notices on TED. Award data can be incomplete.
Only the original notice and the buyer's documents are legally binding.