Electron Beam Lithography (EBL) Tool
- Buyer
- Lunds universitet, Lund
- Country
- Sweden
- Estimated value
- SEK 26,000,000
- Deadline
- 5 Nov 2026, 23:59 CET
- Published
- 7 Oct 2026
- Procedure
- Open procedure
- Contract type
- Supplies
Categories
- 38000000 Laboratory, optical and precision equipments (excl. glasses)
From the original notice
Lund University, Department of Physics, Lund Nano Lab is acquiring an Electron Beam Lithography Tool. The instrument is intended for high resolution, repeatable patterning, equipped with a large writing field for high throughput patterning, and automated self-calibration routines to support long exposures with minimal errors due to beam drift. Finally, its flexible sample loading system must be configured for a wide range of samples from small pieces used for basic science, or wafers up to 8" in diameter for pilot production testing. With these properties, the Electron Beam Lithography Tool…
Only the original notice and the buyer's documents are legally binding.