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Delivery and installation of a High ion density etcher for lithium niobate on insulator - LiNb03 (LN)

Buyer
Danmarks Tekniske Universitet - DTU, Kgs. Lyngby
Country
Denmark
Estimated value
—
Deadline
15 Oct 2026, 23:55 CEST
Published
11 Sept 2026
Procedure
Open procedure
Contract type
Supplies

Categories

  • 42000000 Industrial machinery
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From the original notice

DTU Nanolab wishes to acquire a high ion density source reactive ion etcher for etching lithium niobate on insulator 150 mm wafer processing. Delivery is expected no later than Q4 2027. We are looking for a highly versatile instrument providing stable etch recipes, capable of etching at both nanometer scale and micrometer scale with precise control of etching depth, typically a few hundreds of nm. The instrument must have state-of-the-art performance in terms of profile control, uniformity, selectivity, and in particu-lar etching sidewall smoothness to achieve low waveguide loss. The…

Past winners

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Falck Danmark A/S1 Jul 2026—

53 awards in 12 months · 48 different winners

Based on contract award notices on TED. Award data can be incomplete.

Only the original notice and the buyer's documents are legally binding.

Source: TED — Tenders Electronic Daily, © European Union

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